Abstract

Polycrystalline HfZrO2 (HZO) film can be fabricated on as-extruded Mg–Ca alloy, which is identified by the results of XRD and TEM. HZO film can improve the corrosion resistance of as-extruded Mg–Ca alloy to further result in a decrease in the corrosion rate of Mg–Ca alloy. Corrosion current density, pH value evaluation, and the corrosion surface image provide evidence of improvement in corrosion rate. Compared with ZrO2 film, HZO film shows better short-term corrosion resistance. The results of WST-1 assay and LDH assay show that HZO film has low toxicity and is suitable for the protective coating of biological implants.

Highlights

  • The self-limiting chemical property as a unique characteristic leads atomic layer deposition (ALD) to have several benefits, including precise thickness control, conformal coverage, large-scale fabrication, and excellent uniformity [1,2,3]

  • Daubert et al have studied the corrosion protection of different ALD oxide films, including Al2 O3, TiO2, ZnO, ZrO2, and HfO2 films, on copper. Those oxide films deposited by ALD show different corrosion resistance values and decline of corrosion resistance which reflects in the different extent of the short-term and long-term corrosion protection [5]

  • The element distribution of the as-extruded Mg–Ca alloy is mapped through wavelengthdispersive X-ray spectroscopy (WDS)

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Summary

Introduction

The self-limiting chemical property as a unique characteristic leads atomic layer deposition (ALD) to have several benefits, including precise thickness control, conformal coverage, large-scale fabrication, and excellent uniformity [1,2,3]. Daubert et al have studied the corrosion protection of different ALD oxide films, including Al2 O3 , TiO2 , ZnO, ZrO2, and HfO2 films, on copper. Those oxide films deposited by ALD show different corrosion resistance values and decline of corrosion resistance which reflects in the different extent of the short-term and long-term corrosion protection [5]. Among those materials, ZrO2 shows excellent corrosion protection, good mechanical property, and biocompatibility, which makes ZrO2 film suitable for use as a protective layer for bio-metals

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