Abstract
DC Magnetron sputtered TiC films were subjected to C+ ion implantation in order to modify the microstructure and topography. The surface roughness of implanted films increased due to ion beam induced surface bubbling and blistering. Hardness and Young's modulus values were decreased due to the amorphization of TiC crystalline phase. The adhesive strength of film-substrate interface was not influenced by C+ ion implantation. The tribological results showed considerable enhancement in the wear resistance in the highest dose C+ ion implanted film, compared to as-deposited TiC film. The enhanced properties are correlated to amorphization of TiC crystalline phase.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.