Abstract
In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H2 sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H2 sintering exhibited a high sensitivity than that without H2 sintering. This result may be due to the resulting increase in the number of Si–OH2+ and Si–O− bonds due to the incorporation of H in the gate oxide to reduce the dangling silicon bonds and hence create the surface active sites and the resulting increase in the number of chemical reactions at these surface active sites. Moreover, the LTPS TFT sensor device not only offers low cost and a simple fabrication processes, but the technique also can be extended to integrate the sensor into other systems.
Highlights
PH is one of the most common laboratory measurements because so many chemical and biological processes rely on pH
We report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (LTPS) thin-film transistor (TFT) sensors using
In pH sensing, the change in pH of a solution causes a shift of the threshold voltage in the IDS-VGS curve, mainly due to the ionization of surface OH groups by either H+ or OH−
Summary
PH is one of the most common laboratory measurements because so many chemical and biological processes rely on pH. In. ISFET devices, the metal gate electrode of metal-oxide-semiconductor field-effect transistors (MOSFETs) is replaced by the series combination of the reference electrode, electrolyte and chemically sensitive membrane. Low-temperature polycrystalline-silicon (LTPS) thin-film transistors (TFTs) have been developed to function as transducers for ultrasensitive and label-free detection of biomolecules, such as proteins, DNA, glucose, viruses, etc., due to their excellent electrical characteristics in aqueous solution [7,8,9,10,11]. They are mass-produced a simple, low-cost, and low-temperature processes.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
