Improvement in performance of electrically tunable devices based on nonlinear dielectric SrTiO3 using a homoepitaxial LaAlO3 interlayer

Abstract

Improved structural and dielectric properties of nonlinear dielectric SrTiO3 thin films on LaAlO3 substrates were accomplished by incorporating a homoepitaxial LaAlO3 interlayer between the substrate and the dielectric film. Using this interlayer, the quality factor of SrTiO3 films with high-temperature superconducting YBa2Cu3O7−x electrodes on LaAlO3 substrates was improved by more than 50% at 4.2 GHz and 4 K. This improvement, combined with no change in nonlinearity, led to greater than a 50% enhancement of the finesse factor (defined as the product of the quality factor and the fractional shift resonant frequency) for the coplanar waveguide microwave resonators. The reduced planar defect density in the SrTiO3 films was attributed to this improvement.