Improved zonal integration method for high accurate surface reconstruction in quantitative deflectometry.

Abstract

In quantitative deflectometry, a test optical component is generally divided into numerous sample regions by the pixels on a camera's CCD detector, and the adjacent intervals of sample regions are unequal in off-axis configurations. In this case, errors will be introduced in the reconstruction result if the traditional Southwell zonal integration method is arbitrarily used. Thus, an improved zonal method is proposed in this paper. Both simulations and experiments are conducted to demonstrate the validity and accuracy of the improved zonal method. In the simulations, compared with the traditional zonal method, the reconstruction accuracy for three different figures of sphere, hyperbolic, and flat surfaces using our proposed method is obviously improved, especially when the aperture of the test optics is not rectangular, but circular. Experimental results also show that when we integrate the slopes measured at unequal-spaced sampling points, the proposed zonal method is superior to the traditional zonal method in accuracy; meanwhile, it has advantages over the modal methods in reconstructing local detail information, such as a slight surface scratch, on the test optical component.