Abstract
Vibration-based energy harvesting using piezoelectric circular diaphragms (PCDs) with a structure featuring the central mass (C-mass) configuration has drawn much attention in recent decades. In this work, we propose a new configuration with the annular proof mass (A-mass) where an improved energy harvesting is promised. The numerical analysis was employed using the circuit-coupled piezoelectric simulation, and the experimental validation was implemented using PCDs with the even-width annular electrodes. Samples with the different mass configurations as well as structural parameters ϖ1 and ϖ2, which indicate the ratio between the inner boundary radius and piezoelectric ceramic radius as well as the ratio between outer boundary radius and the substrate radius, respectively, were prepared and tested. The impedance-matched output power of full-electrode PCDs was also collected, and some distinct improvement was measured on samples with the certain structural parameters. The power increases from 14.1 mW to 19.0 mW after changing the configuration from C-mass to A-mass with the same parameters (ϖ1, ϖ2) = (0.16, 0.9), showing the considerable improvement in energy harvesting by using A-mass configuration.
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