Improved Tougaard background calculation by introduction of fittable parameters for the inelastic electron scattering cross‐section in the peak fit of photoelectron spectra with UNIFIT 2011

Abstract

The shape of the background in x‐ray photoemission spectra is strongly affected by scattered electrons from inelastic energy loss processes. A polynomial of low order has very often been applied to model the secondary‐electron background, giving satisfying results in some cases. An improved analysis employing the Tougaard background model has been successfully used to characterize the inelastic loss processes. However, the correct usage of the Tougaard background needs a well defined inelastic electron scattering cross‐section function λ(E) · K(E, T) (λ = inelastic mean free path, E = kinetic energy, T = energy loss). This paper presents a four‐parameter loss function λ(E) · K(E, T) = B · T/(C + C′ · T2)2 + D · T2 with the fitting parameters B, C, C′ and D implemented in the background function allowing the improved estimation of the λ(E) · K(E, T) function for homogenous materials. The fit of the background parameters is carried out parallel to the peak fit. The results will be compared with the parameters recommended by Tougaard. The calculation of inelastic electron scattering cross‐sections of clean surfaces from different materials using UNIFIT 2011 will be demonstrated. Copyright © 2011 John Wiley & Sons, Ltd.