Abstract
Diamond-like carbon (DLC) film doped with boron has unique properties and displays higher thermal resistance, lower internal stress, and better electrical conductivity than un-doped DLC film; this makes it is suitable for various applications, especially in outer space. Radio-frequency plasma-enhanced chemical vacuum deposition of boron-doped DLC film was performed to determine the optimal percentage of boron for improving thermal resistance. Additional heat treatment and 40% B2H6/CH4 yielded the best electrical conductivity. X-ray photoelectron spectroscopy, thermal gravimetric analysis, Raman spectroscopy, and the four-point probe method were utilized to analyze the properties of boron-doped DLC film. The boron-doped DLC film displayed outstanding performance in terms of thermal resistance and electrical conductivity.
Highlights
Diamond-like carbon (DLC) has an amorphous crystalline structure and includes both sp3 and sp2 bonds
This result could be due to the aggregation of nanoclusters splitting sp2 and sp3, in turn affecting the crystalline structure of the DLC film and creating a boundary composed of sp2
A deposition method was proposed, as shown in Figure 11, and the results indicated that boron-doped DLC film included C-C, C-H, B-C, and BH chains and an amorphous carbon network; there were signs of electron tunneling and formation of a boundary area led to clustering formation
Summary
Diamond-like carbon (DLC) has an amorphous crystalline structure and includes both sp (diamond-like) and sp (graphite-like) bonds. Conventional DLC has poor thermal resistance, leading to degradation of performance under high temperatures. The sp3-bonds change to sp2-bonds, which influence the graphitization of DLC film (Robertson, 2002). The thermal resistance of DLC films is usually poor, which limits their application in high temperature environments. The thermal resistance of DLC film is directly related to its physical characteristics and structure, chemical composition, and thickness. Research on boron-doped DLC films has mostly focused on their electrical properties. The high performance of surface hardness but having conductivity to get rid of charging electrons in plasma circumstance on orbit is required, DLC treated electrical conductive, thermal resistive, and mechanical harness is expected the well-satisfied solution.
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