Improved surface and structural properties of InAs∕GaSb superlattices on (001) GaSb substrate by introducing an InAsSb layer at interfaces

Abstract

In As ∕ Ga Sb type-II superlattices (SLs) were grown on (001) GaSb substrates by metal organic chemical vapor deposition. Besides the expected tensile stress introduced by the InAs layers in the SLs, additional tensile stress is found in the InAs∕GaSb SLs from the simulation of x-ray diffraction (XRD) curves of the SLs. High-resolution transmission electron microscopy and XRD of the SLs grown with different interface gas switching procedures suggest that the additional tensile stress is mainly located at the GaSb→InAs interface. To compensate for the tensile stress in the SL structures, we show that introducing ∼2-ML-thick InAs0.8Sb0.2 layer at the interfaces of the SL improves the morphology and the structural properties of the SLs significantly.