Abstract
We have measured the surface resistance R S of Nb and NbN thin-films with better than ±20% reproducibility for R S down to 1 μΩ at 6 GHz. The technique is based on Q-factor measurements of a coplanar waveguide resonator improved by modern microwave design and packaging practices. The design minimizes extraneous losses, such as radiation and dielectric losses, and no correction for them is necessary. Unloaded Q-factor data are determined from the transmission and reflection frequency response of the resonator which is weakly coupled to a two-port network analyzer. The measured surface resistance of a NbN film deposited on silicon is 1.3 μΩ at 4.2 K and 6 GHz, and its temperature dependence is consistent with BCS theory.
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