Abstract

In order to find the effect of hydrogen (H) treatment on leakage current and current conduction mechanism in GaN nanorods (NRs) Schottky diode, GaN NRs surface was subjected to H plasma treatment. Experimental results showed that Schottky barrier height (Φb) increased, while the ideality factor (n) decreases by the H treatment. The Φb, n of as-grown GaN NRs were found to be 0.54 eV, 2.16, on the other hand in H treated GaN NRs Schottky diodes, Φb was found to be increase to 0.72 eV, and n decreased to 1.30. Barrier inhomogeneity was confirmed by temperature dependence I-V parameters. The surface state density (NSS) calculated from Terman's method were found to be 1.21 × 1013 eV−1cm−2 and 2.15 × 1012 eV−1cm−2 for as-grown and H treated GaN NRs respectively. These results suggested H treatment effectively passivate the surface states and decreased NSS could be leads to enhancement in the Schottky behavior of GaN NRs.

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