Abstract
This paper reports a MEMS analog torsional micro-mirror with improved rotation angle. The working range and consequently the rotation angle limitation of electrostatically actuated torsional micro-mirror due to pull-in instability is solved. Pedestal and suspension beams are presented to achieve electrostatically actuated torsional micro-mirror with extended working range, but without penalties of complex control circuit and large actuation voltage. In the electrostatically actuated torsional micro-mirror increasing the applied voltage decreases the equivalent stiffness of the structure and leads the system to an unstable condition by undergoing to a saddle node bifurcation. In the proposed structure to postpone pull-in instability and increase the rotation angle range, mechanical stiffness of the structure is increased by adding a pedestal and locating auxiliary fixed-free beams in the free ends of the micro-mirror.
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