Abstract
Porous silicon (PS) conductometric gas sensors can exhibit large sensitivity to gases, due to the large surface versus volume ratio of porous silicon. A possible application is the detection of traces of nitrogen dioxide (NO 2), an air pollutant. Δ G/ G signals in excess of 10 in the presence of concentrations as low as 50 ppb in dry air can be demonstrated. Unfortunately, such high sensitivity to NO 2 is achieved, in fresh samples, with poor reversibility. Another problem is the interference of water vapor, which also affects the porous silicon conductivity. However, we show that reversibility is complete in aged samples, and sensitivity to water vapor is lowered. Although in aged samples large Δ G/ G signals are harder to achieve, we show that concentration levels of NO 2 at few tens of ppb are still detectable.
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