Abstract

Compared with Sb2Se, Si–Sb–Se material is proved to be a promising candidate for phase change memory (PCM) use because of its higher crystallization temperature (~230°C), larger crystallization activation energy (3.25eV), and better data retention ability (168°C for 10years). Furthermore, the fast crystallization time 3.30ns is obtained for Si0.20(Sb2Se)0.80 material by the picosecond laser technique. The set switching is realized with low threshold current 6.9μA and voltage 1.80V, respectively. The reverse resistance transition can be achieved by an electric pulse as short as 8ns for Si0.20(Sb2Se)0.80-based PCM cell.

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