Abstract
We presented the self-planar mesa structure for improving the performances of 850-nm oxide-confined vertical cavity surface emitting lasers (VCSELs). By employing the self-planar mesa, the maximum output power was increased from 8 mW to more than 11 mW, and the maximum wall-plug efficiency was improved from 26% to 36% for the VCSEL with an oxide aperture size of 13 mu m at 15 degrees C. The thermal resistance was decreased from 1.16 degrees C/mW to 0.94 degrees C/mW. Thermal simulations about different mesa structures were carried out. And the enhanced lateral heat dissipation and current diffusion within VCSELs was considered to be the main reason for improved performances. Crown Copyright (C) 2013 Published by Elsevier Ltd. All rights reserved.
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