Abstract
In this paper, based on the multiwire core design and microelectromechanical system technology, we report improved performance of a microsolenoid fluxgate sensor by integrating a bilayer core of co-based amorphous ribbon. By means of utilizing integrated multilayer core structure and high permeability amorphous ribbon core material, this paper shows how a high-performance microfluxgate chip with small dimensions can be realized. The fabricated sensors exhibit a best sensitivity of 3165 V/T, a power of 183.2 mW and a linear range of 150 $\mu \text{T}$ at 100 kHz. The noise power density is found to be 0.5 nT/Hz $^{1/2}~1$ Hz and the noise rms level is 2 nT in the frequency range of 25 mHz–10 Hz.
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