Improved Peformance of Micro-Preconcentrator using Mesoporous Silica with High Specific Surface Area as a Surface Template

Abstract

In this paper, mesoporous silica (MS) with high specific surface area was used as a surface template to improve the enrichment performance of micro-preconcentrator $(\mu \mathrm{PC})$ of the volatile organic compounds (VOCs). The $\mu \mathrm{PC}$ was fabricated based on MEMS technology. The MS layer was deposited on the surface of the cavity of the $\mu \mathrm{PC}$ , and then the Tenax-TA was coated on the surface of the MS layer. The enrichment performances of the VOCs of the $\mu \mathrm{PC}$ with Tenax-TA and Tenax-TA using the MS layer as a surface template (MS + Tenax-TA) were respectively measured. The enrichment ratio of butyl acetate of the $\mu \mathrm{PC}$ with Tenax-TA was 3.08, and the $\mu \mathrm{PC}$ with MS + Tenax-TA was as high as 573, which has a 185 times enhancement, suggesting that the MS layer as the surface template of Tenax-TA effectively enhanced the enrichment performance of the VOCs.