Abstract
This paper reports the nanomechanical properties of as grown and hydrogenated tetrahedral amorphous carbon (ta-C, ta-C: H) films deposited by S-bend filtered cathodic vacuum arc technique measured with 1.4 mN load. It has been found that the hydrogenation of ta-C film improved the nanomechanical properties. Maximum hardness (H) of 38.15 GPa (with improvement of similar to 80%) has been obtained for ta-C: H film deposited at a hydrogen partial pressure of 1.4 x 10(-1) Pa and maximum elastic modulus (E) value of 410.1 GPa has been obtained when the hydrogen partial pressure reduced to 7.4 x 10(-3) Pa. The plastic index parameter (HIE) of ta-C: H film (0.11) is found to be superior to that of ta-C film (0.073), which is a measure of wear resistance for coating applications. The improved HIE of ta-C: H films may be due to the passivation of surface defects and favorable formation of sp(3) hybridized bonds.
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