Abstract
High B/sub s/ FeAl(N) single and FeAl(N)/NiFe multilayer films have been prepared by RF-diode sputtering in a Ar/N/sub 2/ mixture on substrates up to diameter using a commercial sputter machine. Preparing the films under an aligning magnetic field led to an uniaxial anisotropy with angular dispersions less than 1/spl deg/. A magnetostriction of /spl lambda//sub s//spl les/1*10/sup -6/ and H/sub C/, H/sub K/ /spl ap/2.5 Oe was achieved for single films. The FeAl(N)/NiFe multilayers display an improved anisotropic behaviour and smaller H/sub C/ and /spl lambda//sub s/ although B/sub s/ is only somewhat below the /spl alpha/-Fe value. Depending on layer periodicity, H/sub K/ varies between 2.3 and 6 Oe for 0.5 /spl mu/m thick films.
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