Abstract
In this letter, to enhance light efficiency of AlGaInP-based LEDs, a nanohole structure was applied to GaP window layer by using self-assemble metal layer nano-masks and inductively coupled plasma (ICP). This method has the potential advantage because both the size and density of the nanoholes are controllable. The density of nanoholes varied from 5×108 to 2.8×108 cm−2 and size varied from 180–430 nm while increasing rapid thermal annealing temperature from 350–500°C. By using this surface texturing method, the light intensity and light output power of AlGaInP-based LEDs with textured surface (LED-II) increases 27% and 15% comaparing to LEDs with flat surface (LED-I), respectively.
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