Abstract
Abstract FeCo films with various thicknesses were fabricated by direct-current magnetron sputtering on corning glass and organic ferroelectric PVDF substrates at the same time with 5 nm Ru seed layer and 5 nm Ta protective layer. The in-plane uniaxial anisotropy field of FeCo on glass substrate increases from 24 to 36 Oe with the increase of FeCo film thickness from 5 to 100 nm. However, a large in-plane anisotropy field of FeCo on PVDF substrate increases with FeCo thickness from 5 to 20 nm and gradually decreases with the FeCo thickness further increasing. Atomic force microscope images of FeCo on glass show quite smooth surface with root-mean-square roughness around 0.5 nm and have none visible granules on the surface for all samples. While, AFM images of FeCo on PVDF show quite rough surface with RMS roughness around 25 nm and have visible granules with the smallest granules appearing at the FeCo thickness of 20 nm. The permeability spectra show the typical ferromagnetic resonance phenomenon and can be well fitted by the LLG equation with the obtained experimental parameters. The ferromagnetic resonance frequency can reach 7.0 GHz for the 20 nm FeCo film on PVDF. Moreover, the quality factor of this sample can respectively reach 26, 12 and 7 at 1.0, 2.0, and 3.0 GHz, indicating the potential real 3G application for high-frequency devices.
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