Abstract
Ba0.67Sr0.33TiO3 (BST) thin film and Ba0.664Y0.006Sr0.33Ti0.995Mn0.005O3 (BYSTM) thin film were deposited on LaNiO3 (LNO)/SiO2/Si substrates by radio frequency magnetron sputtering. All films show polycrystalline with a perovskite structure. A compact, crack-free and uniform morphologies were observed. The breakdown strength and polarization are improved by Mn and Y co-doping. The optimal recoverable energy density of 9.75 J/cm3 for BYSTM is much larger than 3.54 J/cm3 for BST.
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