Abstract
Under certain conditions, electrophoretic deposition (EPD) of single-wall carbon nanotubes (SWCNTs) onto metal at the base of nanoscale insulating windows can result in a single SWCNT per window, bonded at one end to the metal. During EPD charge, buildup on the insulator creates electrostatic lenses at the windows that control the trajectory of the SWCNTs. The aim is to develop a reproducible process for deposition of individual vertically oriented SWCNTs into each window to enable novel devices. The length of the SWCNTs is shown to be the most critical parameter in achieving results that could be used for devices. In particular, single nanotube deposition in windows by EPD was achieved with SWCNTs with lengths on the order of the window depth. By performing current vs voltage (IV) measurements against a platinum wire in a phosphate buffer and by modeling the data, the presence of the nanotube can be detected, the contact interface can be studied, and the nanotube’s viability for device applications can be determined. These results provide a basis for process integration of vertical SWCNTs using EPD.
Highlights
There are many applications where a vertical aligned carbon nanotube (CNT) or an array could be employed in an electronic device as the sensing or active device element
We have demonstrated key advancements to electrophoretic deposition (EPD) by using nanoscale patterns, which enables deposition of single single-wall carbon nanotube (SWCNT) at multiple desired locations, oriented vertically, and potentially electrically isolated from other SWCNTs [13]
Fabrication of the devices started with the deposition of an isolation layer consisting of 100 nm of SiNx and 200 nm of silicon dioxide (SiO2) using plasma enhanced chemical vapor deposition (CVD) (PECVD)
Summary
There are many applications where a vertical aligned carbon nanotube (CNT) or an array could be employed in an electronic device as the sensing or active device element. SWCNTs (referred to as Type-I Suspension) that were either 95% metallic or semiconducting and It was not clear if the length alone, or a combination of length, surfactant selection, nanotube species, and electric field during EPD, was the root cause of this observation. Parametric studies in this contribution were carried out with highly presorted commercial SWCNTs (referred to as Type-I Suspension) that were either 95% metallic or semiconducting and were better protected from bundling by the surfactant choice ( these populations still contained a mixture of lengths). This information will help in understanding the physics of the unique contact geometry and will provide a measure of the health of the device
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