Abstract

An improved electron beam scanning system for electron microprobes has been developed which provides high quality sample current images at a frame repetition rate of ∼45 frames/sec and at sample currents as low as 1 nA. The sample current amplification system consists of an emitter follower at the output of the probe console followed by a limited bandpass video amplifier. Careful selection of the amplifier bandpass, based on the exact scanning frequency, allows high amplification of the signal information while rejecting a large portion of the noise.

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