Abstract

ABSTRACTThe DC and RF characteristics of In0.5Ga0.5P/In0.22Ga0.78As/GaAs MOS p-HEMTs with different gate oxide thickness were investigated and compared with those of Schottky-gate p-HEMT without the gate oxide layer. The oxide layer was implemented by using a liquid phase oxidation technique. It was found that transconductance (gm), threshold voltage and breakdown voltage characteristics of MOS p-HEMTs depended strongly on the gate oxide thickness. The MOS p-HEMTs showed superior DC and RF performances compared with those of GaAs-based MOSFET having oxide/n-GaAs or oxide/InGaAs interface.

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