Abstract
An ion source of electron-cyclotron resonance using cusp magnetic field is designed. The field is generated with two cylindrical magnets polarized parallel to the axis of symmetry. Lines of magnetic induction are in this configuration longer than in conventional cusp machines. The plasma electrons escaping from a line cusp are repelled by applying negative potential to an electrode repeller. The repeller of low work function emits additional electrons. A whistler wave is launched through a helical antenna at a point cusp to produce overdense plasmas. An intense ion beam is formed by extracting ions at the other point cusp where the magnetic flux is focused. The repeller materials are sputtered at the line cusp and ionized in the plasma. The atomic flux from the cylindrical surface is focused at the center of plasma to give abundant ions from the solid materials.
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