Abstract
Pb(Zr0.3Ti0.7)O3-x mol% Mn (PZTM) (x = 0, 1, 2, and 3) thin films with high density and good crystallinity were obtained using a sol-gel method. Improved crystallization, domain, and ferroelectricity through controlling the lead/oxygen vacancies in Mn-doped lead zirconate titanate (PZT) thin films were investigated. Enhanced ferroelectricity and piezoelectricity were obtained in the 1 mol% Mn-doped PZT thin films. According to the Bragg equation, a small amount of Mn replaces the A-site (Pb2+) to achieve donor doping, which is conducive to the movement of domains and enhances the ferroelectric performance and piezoelectric coefficient. The pinning effect leads to reduced ferroelectric performance, which is caused by oxygen vacancies generated by Mn2+ replacing the B-site (Zr4+/Ti4+) during acceptor doping. The research results show that Mn doping is an effective method for improving the ferroelectric performance of PZT thin films.
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