Improved barrier and mechanical properties of Al2O3/acrylic laminates using rugged fluorocarbon layers for flexible encapsulation

Abstract

Thin film encapsulation (TFE) with high barrier performance and mechanical reliability is essential and challenging for flexible organic light-emitting diodes (OLEDs). In this work, SF 6 plasma treatments were introduced for surface modifications of acrylic in Al 2 O 3 /acrylic laminates fabricated by atomic layer deposition (ALD) and ink-jet printing (IJP). It was found that micro-/nano-structures and surface fluoridation appeared on the surface of acrylic, and could be modulated by the discharge power and irradiation of plasma treatment. The water vapor transmission rates (WVTR) of Al 2 O 3 /acrylic multi-layers decreased evidently because of reducing surface polarity and strong cross-link of acrylic after plasma treatments. Furthermore, the rugged surface and relieved residual stress resulted from etching and heating of acrylic could enhance the mechanical property remarkably. The plasma treated Al 2 O 3 /acrylic multi-layers with only 3 dyads exhibited a low WVTR value of 1.02 × 10 −6 g/m 2 /day and more stable mechanical property under 200 iterations blending test by comparative measurements, proving that the introduction of SF 6 plasma surface modifications could improve simultaneously the barrier performance and mechanical reliability prominently of the inorganic/organic multi-layers with no need of extra neutral axis design. • SF 6 plasma treatment was introduced for the interface modification of Al 2 O 3 /acrylic multilayers. • Micro-/nano-structures and surface fluoridation appeared on acrylic surface after SF 6 plasma treatment. • The barrier performance of Al 2 O 3 /acrylic multilayers can be improved remarkably by SF 6 plasma treatment. • The mechanical reliability of Al 2 O 3 /acrylic multilayers can be enhanced evidently by SF 6 plasma treatment.