Abstract
Excellent direct current (dc)-bias and reliability have become increasingly important for ultra-thin BaTiO3-based multilayer ceramic capacitors (MLCCs). Herein, X5R-MLCCs with a thickness of ∼1 μm are fabricated using BaTiO3 with varied grain size. It is shown that the uniformity of the grain size plays an important impact on the direct current (dc)-bias and the reliability of ultra-thin MLCCs. Uniform grain size, which is indicative of good distribution of doping element contributes to improved temperature stability. By contrast, abnormal large grains induce reinforced space charge polarization. Chips with non-uniform grains exhibit dramatic dielectric constant change under dc-bias due to the high tetragonality and irreversible domain-wall motion. Weibull distribution and highly accelerated life test (HALT) reveal that non-uniform grains contain more oxygen vacancies supported by impedance spectra analysis at 300–450 °C. This study provides a feasible strategy to improve the dc-bias and the reliability of the ultra-thin MLCCs.
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