Abstract
The computer program IMPLNT has been written to study what happens as an ion beam is incident on a target. The target is divided into layers, and as each layer is sputtered away, the fraction of beam atoms to target atoms in the surface layer, as well as the distribution off the beam atoms within the target are calculated. At present the program considers the beam ion incident onto a single element target. It takes account of the dilation of the target as beam atoms are added to it, and also the change in range with the increase of beam atoms. A Gaussian distribution is used to distribute the beam atoms within the target. Some samples of the curves plotted by the program are given. Comparison with experiment has indicated that, besides sputtering, diffusion must also be considered.
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