Abstract
We present a novel dual-axis complementary metal–oxide–semiconductor (CMOS) microelectromechanical systems (MEMS) angular actuator driven by Lorentz force. The device has been successfully implemented using the Taiwan Semiconductor Manufacturing Company (TSMC) two-poly four-metal (2P4M) process. The current routing achieved with three metal layers enables independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36 and 2.26 kHz for the two axes.
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