Abstract

We propose and demonstrate the fabrication of a light guide array (LGA) structure to improve the spatial resolution of an implantable image sensor. An LGA structure is composed of an array of holes with a high aspect ratio. By restricting the incident angle into image sensor pixels, unwanted incident light is eliminated and degradation of the spatial resolution owing to the gap from the image sensor is reduced. An LGA plate is fabricated by etching holes on a silicon wafer. The LGA plate is embedded on an image sensor and the improvement of spatial resolution is verified. As an example, images of fluorescent beads were obtained using the image sensor with the LGA plate. The imaging contrast and resolution were successfully enhanced.

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