Abstract
In the present work, In x Ga 1 − x N films with different indium compositions ( x = 0.88, 0.63, 0.36 and 0.18) were prepared on glass substrates using a commercially viable technique known as modified activated reactive evaporation. Electrochemical impedance was used to investigate the anion sensing properties of these films for KCl, KI and KNO 3 salt solutions of different molar concentrations. The anion sensing behaviour of InGaN films is attributed to the presence of high n-type background carrier concentration and positively charged surface donor states. The InGaN based anion sensors were found to have good sensitivity with faster response and recovery time. The film with x = 0.63 was found to have the highest sensitivity for all the anions due to the presence of more active surface area together with large number of surface donor states.
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