Abstract

ABSTRACT The solid solution of Pb(Mg,Nb)O3—Pb(Zr,TiO)O3 materials have high piezoelectric constant of 600∼650 pC/N and electromechanical coupling coefficient k p of 0.65. Due to such high piezoelectric constant and electromechanical coupling coefficient, Pb(Mg,Nb)O3—Pb(Zr,TiO)O3 materials have been attracted attentions for the applications of multilayer ceramic actuators. Actuators are fabricated by staking piezoelectric ceramic materials and inner electrodes, alternatively. However, it is extremely difficult to fabricate huge ceramic actuators without any serious problems during the fabrication process, since there are strikingly different shrinkage rate between the ceramic materials and metal electrodes. In this research, new joining method will be proposed for huge ceramic actuators, and then their electrical properties were investigated. Time dependent leakage current density and impedance spectroscopy were employed to expect device performances.

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