Abstract
A micro vibratory platform driven by converse piezoelectric effects is a promising in-situ recalibration platform to eliminate the influence of bias and scale factor drift caused by long-term storage of micro-electro–mechanical system (MEMS) inertial sensors. The calibration accuracy is critically determined by the stable and repeatable vibration of platform, and it is unavoidably impacted by the residual stress of micro structures and lead zirconate titanate (PZT) hysteresis. The abnormal phenomenon of the observed displacement response in experiments was investigated analytically using the stiffness model of beams and hysteresis model of piezoelectric material. Rather than the hysteresis, the initial deflection formed by the residual stress of the beam was identified as the main cause of the response error around the zero position. This conclusion provides guidelines to improve the performance and control of micro vibratory platforms.
Highlights
Micro-electro–mechanical system (MEMS) inertial sensors are widely used in the aerospace field [1] and in intelligent robots [2]
A micro vibratory platform driven by converse piezoelectric effect was proposed to provide an inertial stimulus for both gyroscope [9] and accelerometer [10] calibration
A multi-axis vibratory platform designed by a team at the University of Michigan for in situ self-calibration of general micro-electro–mechanical system (MEMS) inertial sensors [12,13], which can achieve 150◦ /s angular rate and 0.3 g
Summary
Micro-electro–mechanical system (MEMS) inertial sensors are widely used in the aerospace field [1] and in intelligent robots [2]. An in-situ and movable recalibration platform or method is much needed to suppress the drift without relying on fixed equipment [7] and strict environmental requirements [8] To meet these requirements, a micro vibratory platform driven by converse piezoelectric effect was proposed to provide an inertial stimulus for both gyroscope [9] and accelerometer [10] calibration. A multi-axis vibratory platform designed by a team at the University of Michigan for in situ self-calibration of general MEMS inertial sensors [12,13], which can achieve 150◦ /s angular rate and 0.3 g (1 g = 9.8 m/s2 ) linear acceleration. It is integrated with the commercial Invensense MPU-6500 (IMU)
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