Impacts of Electrode Resistance on Resonance Characteristics of Film Bulk Acoustic Resonators

Abstract

In the actual manufacturing process of film bulk acoustic resonators (FBAR), metal leads are necessary to complete the electrical topological connection. However, the electrode resistance will significantly influence the characteristics of the resonator. In this paper, the influence of electrode resistance on resonance characteristics of FBAR is analyzed. To be specific, how different electrode resistances affect the quality factor, impedance value, and electromechanical coupling factor of the FBAR series-parallel resonance frequencies is studied by incorporating the electrode resistances into an overall equivalent electromechanical model (i.e., the Mason model) and the COMSOL finite element simulation method. The results show that the increase of electrode resistance will result in the decrease of the series resonant frequency, the impedance value increases significantly and the quality factor decreases significantly at series resonant, while the parallel resonant frequency does not change, the impedance value slightly increases and the quality factor slightly decreases at parallel resonant, and their electromechanical coupling factor slightly increases.