Abstract
A kinetic approach is used to study the feasibility of increasing the efficiency of microactuators that use radiometric force through etching holes in a single radiometer vane. It has been shown that a radiometer that consists of small vanes is capable of producing at least an order of magnitude larger force than a single-vane radiometer that takes up the same area. The optimum gap between the vanes is found to be slightly smaller than the vane size, with the optimum Knudsen number of about 0.05 based on the vane height.
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