Abstract
This paper discusses applicability of the Bragg reflection in a periodic grating placed on the top electrode of the film bulk acoustic resonator structure in order to forbid lateral propagation of the spurious Lamb mode. The finite element analysis is performed for two representative structures, namely, Mo/ZnO/Mo and Ru/AlN/Ru, on which the first-order symmetric Lamb mode exhibits the “Type-I” and “Type-II” dispersion, respectively. It is demonstrated theoretically that for both cases, the stop band is generated by the Bragg reflection, and a spurious free resonance is obtainable provided that the grating period and height are set so that the stop band covers the frequency range where the lateral mode resonances occur.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
