Abstract
In this study, we investigated the stress and doping effects of ferroelectric hafnium zirconium oxide (HfZrO) based on material analysis and electrical characteristics. The experimental results revealed that the ferroelectric crystalline phase is effectively transferred by mechanical stress of tantalum nitride (TaN) electrodes, and the origin of stress is mainly the thermal residual stress formed near the TaN and HfZrO interface. The ferroelectric polarization characteristics of HfZrO can be further modified by additional Al doping, which not only improves the leakage current of HfZrO due to the large bandgap of Al2O3 but also simultaneously stabilizes the ferroelectric domain switching under a large coercive field.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
