Abstract
Phase development and changes in crystalline composition of LTCC material during the sintering process were investigated using in-situ X-ray diffraction (XRD) measurements. CeramTape GC was chosen as the chemically simplest model system composed of alumina particles and glass for the investigations. The chemical characterization and microstructural analyses of the tapes sintered with some representative firing profiles were performed by techniques such as (scanning) transmission electron microscope, energy-dispersive X-ray spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and XRD. Moreover, the porosification behavior of LTCC substrates fired at different peak temperatures was studied. These investigations are important for the subsequent wet chemical etching, representing an approach which allows to reduce locally the permittivity of LTCC tapes. Treatment with a KOH solution shows non-selective etching behavior for all substrates. In addition, highly porous silica structures corresponding to Ca and Al depletion from the anorthite phase were observed in all samples after etching treatment.
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