Abstract
The energy-delay characteristics of a nanoelectromechanical (NEM) relay can be improved incomparably by using negative capacitance (NC) in a ferroelectric capacitor. This can augment the internal voltage of a device, which is larger than the externally applied voltage. In this study, the energy-delay product of an NC + NEM relay (in which the ferroelectric capacitor is connected to a switching electrode of an NEM relay in series), as well as the adhesion force of the relay, is investigated. The enhanced energy-delay property of an NEM relay is demonstrated theoretically.
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