Abstract

In this work, we intensively analyzed the performance of junctionless (JL) double-gate (DG) MOSFET for biosensing applications. The dielectric modulation technique has been to detect the biomolecules. Drain current sensitivity (ΔID) and threshold voltage sensitivity (ΔVth) are taken as sensitivity metrics for biomolecule detection. It is observed that JL-DG-MOSFET gives a very good ΔID in the order of 1012. Further, the impact of channel parameters like channel thickness (TC) and channel length (LC) on the sensitivity metrices has also been examined. It is found that downscaling of TC and upscaling of LC improves the threshold voltage sensitivity. However, we observed a peak at LC = 150 nm for drain current sensitivity. Hence, a lower TC (= 8 nm) and LC (= 150 nm) results in better sensitivities and thus can be used for designing JL-DG-FET based biosensors.

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