Abstract
Plasma carbonization was used to study the effect of carbon incorporation on the work function of metal nitride gates. The work functions were shifted by as much as 200 mV upon the incorporation of 8% carbon. X-ray photoelectron spectroscopy shows that these shifts in the work function values are mainly driven by the formation of metal-carbon and carbon-carbon bonds in the metal gate. In particular, the work function decreased with increasing the metal-carbon bond concentration, reaching as low as 4.28 eV for TaC with 50% carbon. This correlation of bonding with the work function can be used to tune the work function of metal gates.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
