Abstract
柔性铰链作为快速反射镜（fast steering mirror，FSM）的关键部件之一，分析其结构特性对FSM性能的影响，用于指导FSM结构设计。通过将柔性铰链简化为弹性环节，等效为3轴的平动刚度和3轴的转动刚度，基于欧拉动力学，建立了两轴FSM的运动微分方程，搭建了FSM控制系统的Simulink仿真模型；在给定振动环境下，仿真分析了结构谐振频率对FSM性能的影响，指出平动固有频率越大，FSM锁零精度越高，平动固有频率选择在伺服系统增益交界频率2倍以上；考虑到锁零精度要求和电机力矩限制，转动固有频率选择在25 Hz～50 Hz。最后结合实物进行了振动试验，仿真结果与振动试验结果一致，验证了仿真模型的正确性。
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