Abstract
Copolymers of 2-(3-methacryloyloxypropyl)-4,5-diphenyl-1,3-oxazole with N-isopropylacrylamide are used as positive-working photoresists. The change of solubility is induced by the dye-sensitized photooxidation of oxazole rings into the corresponding N,N-dibenzoylcarboxamide and subsequent development in aqueous ethanolamine solution. We propose here a novel procedure to result in a marked amplification of oxazole ring photooxidation by reaching the tricarboxamide photoproduct with an ionizable amino derivative, dyeing with an ionic photosensitizer, exposing to flood light and finally developing the photo-image.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
