Abstract
Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Therefore, we propose an approach for reconstruction of the reflection distribution based on a series of measurements at different illumination angles and extrapolation of the missing results to overcome this limitation. The developed algorithm was validated using bidirectional transmittance distribution function (BTDF) measurements. The BRDF measurements were carried out for materials that are commonly used in laser material processing, i.e. substrates and functional coatings. The obtained data were subsequently used to determine the total reflection intensity from all considered materials, which were characterized by reconstructed distributions.
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