Abstract
CdxHg1−xTe layers with bandgap in the mid-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) regions were grown by molecular beam epitaxy, and one-dimensional (1D) and two-dimensional (2D) arrays of planar photodiodes were fabricated by ion milling of vacancy-doped layers. The grown layers have varying densities of needle-shaped structures on the surface. The needles are not associated with twins or dislocations in the layers, but could instead be due to (111) facets being reinforced by a preferential Te diffusion direction over steps on the surface. The needles do not seem to affect diode quality. 64 element 1D arrays of 26×26 μm2 or 26×56 μm2 diodes were processed, and zero-bias resistance-times-area values (R0A) at 77 K of 4×106 Ω cm2 at cutoff wavelength λCO=4.5 μm were measured, as well as high quantum efficiencies. To avoid creating a leakage current during ball-bonding to the 1D array diodes, a ZnS layer was deposited on top of the CdTe passivation layer, as well as extra electroplated Au on the bonding pads. The median measured noise equivalent temperature difference (NETD) on a LWIR array was 14 mK for the 42 operable diodes. 2D arrays showed reasonably good uniformity of R0A and zero-bias current (I0) values. The first 64×64 element 2D array of 16×16 μm2 MWIR diodes has been hybridized to read-out electronics and gave median NETD of 60 mK. Images from both a 1D and a 2D array are shown.
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