Imaging multielement analysis with synchrotron radiation excited X-ray fluorescence radiation

Abstract

Using synchrotron radiation for excitation in energy dispersive X-ray fluorescence analysis, very low limits of detection are achievable and imaging analysis with high spatial resolution is possible. In order to attain a resolution below 10 μm, slit apertures were employed to scan the sample, improving the signal-to-noise ratio considerably. The measured data were transformed using filtered backprojection, thus obtaining the decoded images. Spatial resolutions down to 3 μm were successfully obtained.