Abstract
Dynamic atomic force microscopy (dynamic AFM) with carbon nanotubetips has been suggested as an enabling tool for high precision nanometrologyof critical dimension features of semiconductor surfaces. We investigate theperformance of oscillating AFM microcantilevers with multi-walled carbon nanotube(multi-walled CNT) tips interacting with high aspect ratio structures while inthe attractive regime of dynamic AFM. We present experimental results onSiO2 gratings and tungsten nanorods, which show two distinct imaging artefacts, namely theformation of divots and large ringing artefacts that are inherent to CNT AFM probeoperation. Through meticulous adjustment of operating parameters, the connection of theseartefacts to CNT bending, adhesion, and stiction is described qualitatively and explained.
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