Imaging and Characterization of Crystal Defects

Abstract

This chapter describes the theory of imaging and characterization of defects in crystals by electron microscopy. We start with an overview. This is followed by an introduction to atomic displacements and strain in crystals. The following sections then discuss the kinematic theory of diffraction contrast imaging, the weak-beam imaging technique, and the dynamical theory of electron diffraction from crystal defects. This is followed by a review of diffraction-based defect characterization methods, using CBIM or LACBED. The last section describes the determination of atomic structure of defects using HREM and STEM.